Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507275 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more | 2016-11-29 |
| 9280063 | Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method | Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more | 2016-03-08 |