Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298107 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2016-03-29 |
| 9280063 | Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more | 2016-03-08 |