Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513568 | Lithographic apparatus | Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders +4 more | 2016-12-06 |
| 9280063 | Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method | Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Thibault Simon Mathieu Laurent +1 more | 2016-03-08 |
| 9274436 | Lithographic apparatus and a device manufacturing method | Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel +1 more | 2016-03-01 |