Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268236 | Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder | Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more | 2016-02-23 |