Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494872 | Inspection method for lithography | Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Marcus Adrianus Van De Kerkhof | 2016-11-15 |
| 9470986 | Inspection methods, inspection apparatuses, and lithographic apparatuses | Andreas Fuchs, Scott Anderson Middlebrooks, Panagiotis Pieter Bintevinos | 2016-10-18 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Patrick Warnaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hendrik Jan Hidde Smilde | 2016-02-09 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans, Hendrik Jan Hidde Smilde | 2016-01-12 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hendrik Jan Hidde Smilde | 2016-01-05 |