Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |