Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494872 | Inspection method for lithography | Arie Jeffrey Den Boef, Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-11-15 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |