Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488922 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Yuri Vainer, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef | 2016-11-08 |
| 9298110 | Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device | Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof +2 more | 2016-03-29 |