Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488922 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Vadim Yevgenyevich Banine, Luigi Scaccabarozzi, Arie Jeffrey Den Boef | 2016-11-08 |