Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Justin Kreuzer, Gerrit Johannes Nijmeijer, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |
| 9279657 | Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces | Arie Jeffrey Den Boef | 2016-03-08 |