Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470985 | Lithographic apparatus, sensor and method | Derk Jan Wilfred Klunder, Cornelis Cornelia De Bruijn | 2016-10-18 |
| 9383654 | Fluid handling structure, lithographic apparatus and device manufacturing method | Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen +2 more | 2016-07-05 |
| 9256136 | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply | Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Michel Riepen | 2016-02-09 |