Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9259592 | Apparatus with wireless communication module | Hubert Cecile Francois Martens, Michael Marcel Jose Decre, Jeroen Jacob Arnold Tol | 2016-02-16 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp +3 more | 2016-02-09 |