Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298104 | Substrate holder, lithographic apparatus, and device manufacturing method | Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre | 2016-03-29 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Jacobus Josephus Leijssen +3 more | 2016-02-09 |