Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360771 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Eugene Maria Brinkhof, Jan Bex, Anko Jozef Cornelus Sijben | 2016-06-07 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Jan Bex, Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |