Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494875 | Chuck, a chuck control system, a lithography apparatus and a method of using a chuck | Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Roger W. Schmitz, Arnoud Willem Notenboom, Ronald Van Der Wilk +1 more | 2016-11-15 |
| 9360771 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Eugene Maria Brinkhof, Jan Bex, Johannes Wilhelmus Damen | 2016-06-07 |