Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494875 | Chuck, a chuck control system, a lithography apparatus and a method of using a chuck | Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Anko Jozef Cornelus Sijben, Roger W. Schmitz, Ronald Van Der Wilk +1 more | 2016-11-15 |
| 9429857 | Electrostatic clamp, lithographic apparatus and method | Ronald Van Der Wilk, Roger W. Schmitz, Manon Elise Will | 2016-08-30 |