Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more | 2016-05-03 |
| 9316928 | Stage apparatus, lithographic apparatus and method of positioning an object table | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Andre Bernardus Jeunink | 2016-04-19 |