Issued Patents 2003
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659842 | Method and apparatus for optical monitoring in chemical mechanical polishing | Andreas Norbert Wiswesser, Judon Tony Pan, Buguslaw Swedek | 2003-12-09 |
| 6659849 | Platen with debris control for chemical mechanical planarization | Shijian Li, Jayakumar Gurusamy, Fred C. Redeker | 2003-12-09 |
| 6632124 | Optical monitoring in a two-step chemical mechanical polishing process | Bret W. Adams, Boguslaw A. Swedek, Rajeev Bajaj, Savitha Nanjangud, Andreas Norbert Wiswesser +3 more | 2003-10-14 |
| 6623334 | Chemical mechanical polishing with friction-based control | Shijian Li | 2003-09-23 |
| 6592439 | Platen for retaining polishing material | Shijian Li, Ramin Emami, Andrew J. Nagengast, Douglas Orcutt Brown, Shi-Ping Wang +2 more | 2003-07-15 |
| 6585563 | In-situ monitoring of linear substrate polishing operations | Fred C. Redeker, Shijian Li, Sasson Somekh | 2003-07-01 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Robert D. Tolles, Steven M. Zuniga, Charles C. Garretson | 2003-06-03 |
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil, Ron Northrup +2 more | 2003-05-06 |
| 6557564 | Method and apparatus for cleaning a thin disk | — | 2003-05-06 |
| 6554003 | Method and apparatus for cleaning a thin disc | Bruno Strul | 2003-04-29 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Steven M. Zuniga, Hung Chih Chen, Sen-Hou Ko | 2003-04-01 |
| 6540595 | Chemical-Mechanical polishing apparatus and method utilizing an advanceable polishing sheet | — | 2003-04-01 |
| 6537133 | Method for in-situ endpoint detection for chemical mechanical polishing operations | Nils Johansson, Allan Gleason | 2003-03-25 |
| 6520841 | Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet | Martin Scales, Karl M. Robinson | 2003-02-18 |
| 6516816 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2003-02-11 |
| 6514124 | Carrier head for chemical mechanical polishing a substrate | Steven M. Zuniga, Hung Chih Chen | 2003-02-04 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Steven M. Zuniga, Hung Chih Chen, Kapila Wijekoon, Sen-Hou Ko | 2003-01-28 |
| 6506097 | Optical monitoring in a two-step chemical mechanical polishing process | Bret W. Adams, Boguslaw A. Swedek, Rajeev Bajaj, Savitha Nanjangud, Andreas Norbert Wiswesser +3 more | 2003-01-14 |