Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663466 | Carrier head with a substrate detector | Hung Chih Chen, Ming-Kuei Tseng | 2003-12-16 |
| 6645044 | Method of chemical mechanical polishing with controllable pressure and loading area | — | 2003-11-11 |
| 6602114 | Multilayer retaining ring for chemical mechanical polishing | Junshi Wang | 2003-08-05 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Hung Chih Chen | 2003-06-10 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Robert D. Tolles, Charles C. Garretson | 2003-06-03 |
| 6547641 | Carrier head with a substrate sensor | Ming-Kuei Tseng | 2003-04-15 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2003-04-01 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Hung Chih Chen, Sasson Somekh | 2003-02-11 |
| 6514124 | Carrier head for chemical mechanical polishing a substrate | Hung Chih Chen, Manoocher Birang | 2003-02-04 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Hung Chih Chen, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2003-01-28 |