Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626476 | Robotic gripper apparatus | Constantin Foxman | 2003-09-30 |
| 6520315 | Gripper assembly | Michael Sugarman | 2003-02-18 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Steven M. Zuniga, Hung Chih Chen, Sasson Somekh | 2003-02-11 |