Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6599402 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Mark Denome | 2003-07-29 |
| 6582578 | Method and associated apparatus for tilting a substrate upon entry for metal deposition | Yezdi Dordi, Joseph Stevens | 2003-06-24 |
| 6551488 | Segmenting of processing system into wet and dry areas | H. Peter W. Hey, Mark Denome | 2003-04-22 |
| 6523553 | Wafer edge cleaning method and apparatus | Fred C. Redeker, Brian J. Brown | 2003-02-25 |
| 6520315 | Gripper assembly | Boris Govzman | 2003-02-18 |
| 6516816 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White +2 more | 2003-02-11 |