Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662673 | Linear motion apparatus and associated method | — | 2003-12-16 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Ratson Morad, Peter Hey, Mark Denome, Michael Sugarman +10 more | 2003-10-21 |
| 6612014 | Dual post centrifugal wafer clip for spin rinse dry unit | Bernardo Donoso, Joseph Stevens, Alexander Sou-Kang Ko | 2003-09-02 |
| 6585876 | Flow diffuser to be used in electro-chemical plating system and method | Yezdi Dordi, Joseph Stevens, H. Peter W. Hey | 2003-07-01 |
| 6571657 | Multiple blade robot adjustment apparatus and associated method | Avi Tepman, Timothy Joseph Franklin | 2003-06-03 |
| 6557237 | Removable modular cell for electro-chemical plating and method | — | 2003-05-06 |
| 6516815 | Edge bead removal/spin rinse dry (EBR/SRD) module | Joe Stevens, Alex Ko, Yeuk-Fai Edwin Mok | 2003-02-11 |
| 6517130 | Self positioning vacuum chuck | Bernardo Donoso, Joseph Stevens, Mark Denome | 2003-02-11 |