Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599402 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Roy Edwards, Bob Lowrance, Michael Sugarman, Mark Denome | 2003-07-29 |
| 6516815 | Edge bead removal/spin rinse dry (EBR/SRD) module | Donald Olgado, Alex Ko, Yeuk-Fai Edwin Mok | 2003-02-11 |