Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Michael Sugarman +10 more | 2003-10-21 |
| 6599402 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Michael Sugarman | 2003-07-29 |
| 6551488 | Segmenting of processing system into wet and dry areas | H. Peter W. Hey, Michael Sugarman | 2003-04-22 |
| 6517130 | Self positioning vacuum chuck | Bernardo Donoso, Joseph Stevens, Donald Olgado | 2003-02-11 |