Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6658763 | Method for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2003-12-09 |
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Peter Hey, Mark Denome, Michael Sugarman +10 more | 2003-10-21 |
| 6599368 | System architecture of semiconductor manufacturing equipment | Ho Seon Shin | 2003-07-29 |