Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585876 | Flow diffuser to be used in electro-chemical plating system and method | Yezdi Dordi, Joseph Stevens, Donald Olgado | 2003-07-01 |
| 6551484 | Reverse voltage bias for electro-chemical plating system and method | Yezdi Dordi | 2003-04-22 |
| 6551488 | Segmenting of processing system into wet and dry areas | Michael Sugarman, Mark Denome | 2003-04-22 |
| 6514671 | Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics | Suketu Arun Parikh, Mehul Naik, Samuel Broydo | 2003-02-04 |