Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656837 | Method of eliminating photoresist poisoning in damascene applications | Ping Xu, Li-Qun Xia, Larry Dworkin | 2003-12-02 |
| 6548396 | Method of producing an interconnect structure for an integrated circuit | Samuel Broydo | 2003-04-15 |
| 6514671 | Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics | Suketu Arun Parikh, Samuel Broydo, H. Peter W. Hey | 2003-02-04 |
| 6514857 | Damascene structure fabricated using a layer of silicon-based photoresist material | Tim Weidman, Dian Sugiarto, Allen Zhao | 2003-02-04 |