Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632735 | Method of depositing low dielectric constant carbon doped silicon oxide | Wai-Fan Yau, Ju-Hyung Lee, Nasreen Chopra, Tzu-Fang Huang, David Cheung +5 more | 2003-10-14 |
| 6589715 | Process for depositing and developing a plasma polymerized organosilicon photoresist film | Olivier Joubert, Cedric Monget, Timothy Weidman, David Mui | 2003-07-08 |
| 6514857 | Damascene structure fabricated using a layer of silicon-based photoresist material | Mehul Naik, Tim Weidman, Allen Zhao | 2003-02-04 |