Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592980 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Alexandros T. Demos, Nikolaos Bekiaris +3 more | 2003-07-15 |
| 6589715 | Process for depositing and developing a plasma polymerized organosilicon photoresist film | Olivier Joubert, Cedric Monget, Dian Sugiarto, David Mui | 2003-07-08 |
| 6583071 | Ultrasonic spray coating of liquid precursor for low K dielectric coatings | Yunfeng Lu, Michael P. Nault, Michael Barnes, Farhad Moghadam | 2003-06-24 |
| 6576568 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2003-06-10 |
| 6573030 | Method for depositing an amorphous carbon layer | Kevin Fairbairn, Michael R. Rice, Christopher S. Ngai, Ian Latchford, Christopher Dennis Bencher +1 more | 2003-06-03 |