Issued Patents 2003
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-12-09 |
| 6626185 | Method of depositing a silicon containing layer on a semiconductor substrate | Alex Demos, Paul Shufflebotham, Huong Nguyen, Brian McMillin, Monique Ben-Dor | 2003-09-30 |
| 6617794 | Method for controlling etch uniformity | John Holland, Valentin Todorov, Mohit Jain, Alexander Paterson | 2003-09-09 |
| 6598615 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber | John Holland, Steve S. Y. Mak, Patrick Leahey, Jonathan D. Mohn | 2003-07-29 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-07-22 |
| 6583071 | Ultrasonic spray coating of liquid precursor for low K dielectric coatings | Timothy Weidman, Yunfeng Lu, Michael P. Nault, Farhad Moghadam | 2003-06-24 |
| 6569257 | Method for cleaning a process chamber | Huong Nguyen, Li-Qun Xia, Ellie Yieh | 2003-05-27 |
| 6562690 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-05-13 |
| 6541282 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2003-04-01 |
| 6521546 | Method of making a fluoro-organosilicate layer | Hichem M'Saad, Huong Nguyen, Farhad Moghadam | 2003-02-18 |
| 6521082 | Magnetically enhanced plasma apparatus and method with enhanced plasma uniformity and enhanced ion energy control | Hongqing Shan | 2003-02-18 |
| 6511923 | Deposition of stable dielectric films | Yaxin Wang, Thanh Pham, Farhad Moghadam | 2003-01-28 |
| 6507155 | Inductively coupled plasma source with controllable power deposition | John Holland, Valentin Todorov | 2003-01-14 |