Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617794 | Method for controlling etch uniformity | Michael Barnes, John Holland, Valentin Todorov, Mohit Jain | 2003-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617794 | Method for controlling etch uniformity | Michael Barnes, John Holland, Valentin Todorov, Mohit Jain | 2003-09-09 |