Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660127 | Apparatus for plasma etching at a constant etch rate | Padmapani Nallan, John Holland, Thorsten Lill | 2003-12-09 |
| 6617794 | Method for controlling etch uniformity | Michael Barnes, John Holland, Mohit Jain, Alexander Paterson | 2003-09-09 |
| 6507155 | Inductively coupled plasma source with controllable power deposition | Michael Barnes, John Holland | 2003-01-14 |