Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617794 | Method for controlling etch uniformity | Michael Barnes, John Holland, Valentin Todorov, Alexander Paterson | 2003-09-09 |
| 6613682 | Method for in situ removal of a dielectric antireflective coating during a gate etch process | Thorsten Lill, Jeff Chinn | 2003-09-02 |
| 6599842 | Method for rounding corners and removing damaged outer surfaces of a trench | John Chao, Jeffrey D. Chinn | 2003-07-29 |