Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613682 | Method for in situ removal of a dielectric antireflective coating during a gate etch process | Mohit Jain, Thorsten Lill | 2003-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613682 | Method for in situ removal of a dielectric antireflective coating during a gate etch process | Mohit Jain, Thorsten Lill | 2003-09-02 |