Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660127 | Apparatus for plasma etching at a constant etch rate | John Holland, Valentin Todorov, Thorsten Lill | 2003-12-09 |
| 6642127 | Method for dicing a semiconductor wafer | Ajay Kumar, Anisul Khan, Dragan Podlesnik | 2003-11-04 |
| 6642151 | Techniques for plasma etching silicon-germanium | Anisul Khan, Ajay Kumar | 2003-11-04 |
| 6638874 | Methods used in fabricating gates in integrated circuit device structures | Sang In Yi, Seowoo Nam, Kenlin Huang | 2003-10-28 |
| 6583065 | Sidewall polymer forming gas additives for etching processes | Raney Williams, Jeffrey D. Chinn, Jitske Trevor, Thorsten Lill, Tamas Varga +1 more | 2003-06-24 |
| 6579806 | Method of etching tungsten or tungsten nitride in semiconductor structures | Hakeem Oluseyi | 2003-06-17 |
| 6531404 | Method of etching titanium nitride | Tong Zhang | 2003-03-11 |
| 6503845 | Method of etching a tantalum nitride layer in a high density plasma | — | 2003-01-07 |