Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638874 | Methods used in fabricating gates in integrated circuit device structures | Sang In Yi, Seowoo Nam, Padmapani Nallan | 2003-10-28 |
| 6635577 | Method for reducing topography dependent charging effects in a plasma enhanced semiconductor wafer processing system | John M. Yamartino, Peter K. Loewengardt, Diana Xiaobing Ma | 2003-10-21 |