Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Hong Shih, Jie Yuan, Danny Lu | 2003-11-04 |
| 6635577 | Method for reducing topography dependent charging effects in a plasma enhanced semiconductor wafer processing system | John M. Yamartino, Peter K. Loewengardt, Kenlin Huang | 2003-10-21 |
| 6620289 | Method and apparatus for asymmetric gas distribution in a semiconductor wafer processing system | Chun Yan, Yan Ye | 2003-09-16 |
| 6592707 | Corrosion-resistant protective coating for an apparatus and method for processing a substrate | Hong Shih, Nianci Han, Jie Yuan, Joe Sommers, Paul Vollmer +1 more | 2003-07-15 |
| 6569775 | Method for enhancing plasma processing performance | Peter Loewenhardt, John M. Yamartino, Hui Chen | 2003-05-27 |
| 6547978 | Method of heating a semiconductor substrate | Yan Ye, Allen Zhao, Xiancan Deng, Chang-Lin Hsieh | 2003-04-15 |
| 6547977 | Method for etching low k dielectrics | Chun Yan, Gary Hsueh, Yan Ye | 2003-04-15 |
| 6534416 | Control of patterned etching in semiconductor features | Yan Ye, Allen Zhao, Xiancan Deng | 2003-03-18 |