Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547977 | Method for etching low k dielectrics | Chun Yan, Yan Ye, Diana Xiaobing Ma | 2003-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547977 | Method for etching low k dielectrics | Chun Yan, Yan Ye, Diana Xiaobing Ma | 2003-04-15 |