Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649532 | Methods for etching an organic anti-reflective coating | Hui Chen, Xikun Wang, Hong Shih, Wai-Fan Yau | 2003-11-18 |
| 6620289 | Method and apparatus for asymmetric gas distribution in a semiconductor wafer processing system | Yan Ye, Diana Xiaobing Ma | 2003-09-16 |
| 6547977 | Method for etching low k dielectrics | Gary Hsueh, Yan Ye, Diana Xiaobing Ma | 2003-04-15 |
| 6537918 | Method for etching silicon oxynitride and dielectric antireflection coatings | Pavel Ionov, Sung Ho Kim, Dean Li, James C. Wang | 2003-03-25 |