Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649532 | Methods for etching an organic anti-reflective coating | Xikun Wang, Hong Shih, Chun Yan, Wai-Fan Yau | 2003-11-18 |
| 6607675 | Method of etching carbon-containing silicon oxide films | Chang-Lin Hsieh, Jie Yuan, Yan Ye | 2003-08-19 |