Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Hong Shih, Danny Lu, Diana Xiaobing Ma | 2003-11-04 |
| 6625992 | Cooling system for HTS machines | James Maguire, Peter M. Winn, Ahmed Sidi-Yekhlef | 2003-09-30 |
| 6607675 | Method of etching carbon-containing silicon oxide films | Chang-Lin Hsieh, Hui Chen, Yan Ye | 2003-08-19 |
| 6592707 | Corrosion-resistant protective coating for an apparatus and method for processing a substrate | Hong Shih, Nianci Han, Joe Sommers, Diana Xiaobing Ma, Paul Vollmer +1 more | 2003-07-15 |
| 6559942 | Monitoring substrate processing with optical emission and polarized reflected radiation | Zhifeng Sui, Coriolan Frum, Chang-Lin Hsieh | 2003-05-06 |
| 6532748 | Cryogenic refrigerator | James Maguire, Ahmed Sidi-Yekhlef, Peter M. Winn | 2003-03-18 |