Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649532 | Methods for etching an organic anti-reflective coating | Hui Chen, Xikun Wang, Chun Yan, Wai-Fan Yau | 2003-11-18 |
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2003-11-04 |
| 6623595 | Wavy and roughened dome in plasma processing reactor | Nianci Han, Li Xu, Yan Ye | 2003-09-23 |
| 6592707 | Corrosion-resistant protective coating for an apparatus and method for processing a substrate | Nianci Han, Jie Yuan, Joe Sommers, Diana Xiaobing Ma, Paul Vollmer +1 more | 2003-07-15 |
| 6508911 | Diamond coated parts in a plasma reactor | Nianci Han, Jennifer Y. Sun, Li Xu | 2003-01-21 |