Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649532 | Methods for etching an organic anti-reflective coating | Hui Chen, Hong Shih, Chun Yan, Wai-Fan Yau | 2003-11-18 |
| 6527968 | Two-stage self-cleaning silicon etch process | Scott Williams, Shaoher X. Pan | 2003-03-04 |