Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589879 | Nitride open etch process based on trifluoromethane and sulfur hexafluoride | Wei Liu, David Mui | 2003-07-08 |
| 6566270 | Integration of silicon etch and chamber cleaning processes | Wei Liu, Stephen Yuen, David Mui, Meihua Shen | 2003-05-20 |
| 6527968 | Two-stage self-cleaning silicon etch process | Xikun Wang, Shaoher X. Pan | 2003-03-04 |