Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589879 | Nitride open etch process based on trifluoromethane and sulfur hexafluoride | Scott Williams, David Mui | 2003-07-08 |
| 6566270 | Integration of silicon etch and chamber cleaning processes | Scott Williams, Stephen Yuen, David Mui, Meihua Shen | 2003-05-20 |