Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635573 | Method of detecting an endpoint during etching of a material within a recess | Wilfred Pau, Jeffrey D. Chinn | 2003-10-21 |
| 6599437 | Method of etching organic antireflection coating (ARC) layers | Oranna Yauw, Nicolas Gani, Jeffrey D. Chinn | 2003-07-29 |
| 6566270 | Integration of silicon etch and chamber cleaning processes | Wei Liu, Scott Williams, Stephen Yuen, David Mui | 2003-05-20 |
| 6551941 | Method of forming a notched silicon-containing gate structure | Chan Syun David Yang, Oranna Yauw, Jeffrey D. Chinn | 2003-04-22 |