Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599437 | Method of etching organic antireflection coating (ARC) layers | Oranna Yauw, Meihua Shen, Jeffrey D. Chinn | 2003-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599437 | Method of etching organic antireflection coating (ARC) layers | Oranna Yauw, Meihua Shen, Jeffrey D. Chinn | 2003-07-29 |