Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599437 | Method of etching organic antireflection coating (ARC) layers | Meihua Shen, Nicolas Gani, Jeffrey D. Chinn | 2003-07-29 |
| 6551941 | Method of forming a notched silicon-containing gate structure | Chan Syun David Yang, Meihua Shen, Jeffrey D. Chinn | 2003-04-22 |