Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653237 | High resist-selectivity etch for silicon trench etch applications | Shashank Deshmukh, Jeffrey D. Chinn, Dragan Podlesnik | 2003-11-25 |
| 6632321 | Method and apparatus for monitoring and controlling wafer fabrication process | Thorsten Lill, Michael N. Grimbergen | 2003-10-14 |
| 6589715 | Process for depositing and developing a plasma polymerized organosilicon photoresist film | Olivier Joubert, Cedric Monget, Timothy Weidman, Dian Sugiarto | 2003-07-08 |
| 6589879 | Nitride open etch process based on trifluoromethane and sulfur hexafluoride | Scott Williams, Wei Liu | 2003-07-08 |
| 6566270 | Integration of silicon etch and chamber cleaning processes | Wei Liu, Scott Williams, Stephen Yuen, Meihua Shen | 2003-05-20 |
| 6510471 | Method for choosing device among plurality of devices based on coherncy status of device's data and if device supports higher-performance transactions | Manuel J. Alvarez, II, Kenneth D. Klapproth | 2003-01-21 |