Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653237 | High resist-selectivity etch for silicon trench etch applications | David Mui, Jeffrey D. Chinn, Dragan Podlesnik | 2003-11-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653237 | High resist-selectivity etch for silicon trench etch applications | David Mui, Jeffrey D. Chinn, Dragan Podlesnik | 2003-11-25 |